High-frequency high-vacuum cermet sealing equipment
- Product Description
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Project
Configuration and Metrics 1
System Control Industrial industrial control touch screen, standard vacuum interface, metallization process parameter operation and display, high-frequency sealing process parameter operation and display. Standard electric control cabinet is equipped with security devices such as overvoltage and undervoltage protection, phase pole protection, safety interlock, emergency stop button, etc., with power distribution and power supply and installation and connection of electrical units. 2
Ceramic Metallization Chamber The process chamber is made of 304 stainless steel, which is electrolytically polished inside and outside. 1. The door is opened before entering and leaving the sample and is located in the glove box. 1. The door is opened after overhaul and maintenance. All of them are equipped with observation windows. The internal anti-fouling glass can be replaced and multiple flange interfaces are reserved. 2.1
Vacuum system Vacuum configuration pumping speed 35m 3/h scroll dry pump, pneumatic valve control; Pumping speed 4320 m3/h magnetic levitation molecular pump, plug valve control. Ultimate vacuum ≤ 2E-7 Torr, with atmosphere to 2E-7Torr wide range compound vacuum gauge. Several sets of pneumatic shut-off valves control charging and discharging and process gas introduction. 1 flow controller calibration H2, range 0~200sccm,1 flow controller calibration N2, range 0~500sccm. 2.2
Process Configuration Equipped with 3 sets of water-cooled electrodes; 3 groups of metal heating belts, heating temperature 1800 ℃ 5 ℃; One 20KW temperature control heating power supply with PID closed-loop temperature control, with temperature control accuracy of 2 degrees Celsius; One set of all-metal heat insulation screen; Install 4 layers of Mo screen and 4 layers of high-temperature stainless steel screen, equipped with high-temperature material bearing frame, Mo metal bearing body and tray. 3
High frequency induction sealing chamber The process chamber is made of 304 stainless steel, which is electrolytically polished inside and outside. 1. The door is opened before entering and leaving the sample and is located in the glove box. 1. The door is opened after overhaul and maintenance. All of them are equipped with observation windows. The internal anti-fouling glass can be replaced and multiple flange interfaces are reserved. 3.1
Vacuum system Vacuum configuration pumping speed 20m 3/h scroll dry pump, pneumatic valve control; Pumping speed 2232 m3/h magnetic levitation molecular pump, plug valve control. Ultimate vacuum ≤ 2E-7 Torr with wide range compound vacuum gauge from atmosphere to 2E-7Torr. Several sets of pneumatic shut-off valves control charging and discharging and process gas introduction. 3.2
Process Configuration Equipped with 2 sets of high-frequency water-cooled electrodes; Equipped with 1 set of high-frequency inductance coil, applicable frequency 40KHz; Equipped with 1 set of inductance coil lifting mechanism, lifting height 200mm; Equipped with 1 10KW high-frequency power supply, power output sine wave 40KHz, current output adjustment 2A ~ 50A; Distribution power output controller, maximum control current 50A, contact resistance <0.005Ω, time control range 1s ~ 180s, input with transient damper; set workpiece clamping, positioning device, with baking lighting power 1.6KW/80V; manual adjustable. 3.3
Glover box The glove box of the equipment warehouse is 1500mm mm long, 330mm wide and has four glove positions. The warehouse is equipped with a metallized vacuum chamber and a sealed vacuum chamber inlet and outlet door, and a sample transfer track is arranged at the lower bottom. The glove box of the operation warehouse is 1200mm mm long, 750mm wide and has four glove positions. The warehouse is equipped with a material storage rack for the placement and storage of application items in the process of the equipment. It is also equipped with sample transition bin. 3.4
Rack Install the glove box and fixed metalized vacuum chamber and high-frequency sealing vacuum chamber. The rack is equipped with casters, which can move the position and adjust the support bracket to fix it.
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Contact: Miss Dai
Address: 1704, Building 1, Chongwen Park, Nanshan Zhiyuan, 3370 Liuxian Avenue, Nanshan District, Shenzhen City, Guangdong Province
Shenyang Office Address: Shenyang University Science Park, No.15 Wanghua South Street, Dadong District, Shenyang City, Liaoning Province
Telephone:13632750017
E-mail:sales@hitsemi.com
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