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PECVD: Plasma-Enhanced Chemical Vapor Deposition

The PECVD plasma-enhanced chemical vapor deposition equipment is primarily used for growing thin films of silicon nitride and silicon oxide in a clean, vacuum environment. Utilizing single-frequency or dual-frequency plasma-enhanced chemical vapor deposition technology, this equipment represents an ideal process for depositing high-quality thin films of silicon nitride, silicon oxide, and other materials.

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  • Product Description
  • The PECVD plasma-enhanced chemical vapor deposition equipment is primarily used for growing thin films of silicon nitride and silicon oxide in a clean, vacuum environment. Utilizing single-frequency or dual-frequency plasma-enhanced chemical vapor deposition technology, this equipment represents an ideal process for depositing high-quality thin films of silicon nitride, silicon oxide, and other materials.

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