PECVD: Plasma-Enhanced Chemical Vapor Deposition
The PECVD plasma-enhanced chemical vapor deposition equipment is primarily used for growing thin films of silicon nitride and silicon oxide in a clean, vacuum environment. Utilizing single-frequency or dual-frequency plasma-enhanced chemical vapor deposition technology, this equipment represents an ideal process for depositing high-quality thin films of silicon nitride, silicon oxide, and other materials.
- Product Description
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The PECVD plasma-enhanced chemical vapor deposition equipment is primarily used for growing thin films of silicon nitride and silicon oxide in a clean, vacuum environment. Utilizing single-frequency or dual-frequency plasma-enhanced chemical vapor deposition technology, this equipment represents an ideal process for depositing high-quality thin films of silicon nitride, silicon oxide, and other materials.
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