Cluster type OLED device
- Product Description
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This product is the independent "OLED vacuum evaporation process equipment", is the "neck" of the 35 key technologies of the sixth. The project technical team has completed the R & D, design and manufacturing of G1 (generation 1 line) and G2.5 (generation 2.5 line).
The project technical team has solved most of the key technical problems (e. g. source furnace technology, precision alignment technology (alignment accuracy up to 1.5 μm), precision evaporation power supply technology, in-situ film thickness measurement technology, high vacuum transfer manipulator, electronic control system and automation control software, etc.).
The company can undertake the design and manufacture of G1 and G2.5 process lines of OLED.Application areas
It can be widely used in OLED device development, quantum dot development, thin film solar cell device development, OLED micro display development and production, OLED material verification, VR(Micro-oled virtual reality), OLED lighting, etc.
Main technical indicators
Indicators
Parameters
alignment accuracy
CCD precision alignment ≤ 1.5μm mechanical alignment ≤ 150μm
Film thickness uniformity and repetition
±2%
Overall technical route
Adoption of cluster scheme
Process flow
Design-Audit-Outsourcing-Assembly-Electrical Installation-Commissioning-Delivery
Equipment composition
OLED chamber
Key words:
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Contact: Miss Dai
Address: 1704, Building 1, Chongwen Park, Nanshan Zhiyuan, 3370 Liuxian Avenue, Nanshan District, Shenzhen City, Guangdong Province
Shenyang Office Address: Shenyang University Science Park, No.15 Wanghua South Street, Dadong District, Shenyang City, Liaoning Province
Telephone:13632750017
E-mail:sales@hitsemi.com
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