High vacuum dual-frequency PECVD thin film preparation equipment
- Product Description
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Project
Configuration and Metrics 1
overall structure The total power of the equipment is 7KW, which is composed of PECVD coating chamber, gas circuit system, vacuum system, substrate heating system, gas inlet electrode, dual frequency power supply, electrical control system, exhaust gas treatment device and software. 2
System Control Touch screen and PLC central control mode are adopted, and relevant electrical control units are coordinated to monitor and control the equipment coating room, dual-frequency power supply, film thickness monitoring system, etc., and automatic sound and light alarm and protection systems for water, electricity, gas, vacuum and temperature faults are provided. 3
Vacuum system Vacuum configuration pumping speed 35m 3/h scroll dry pump, pneumatic valve control; Pumping speed 4320 m3/h magnetic levitation molecular pump, plug valve control. The ultimate vacuum of the vacuum chamber is ≤ 5 × 10-5Pa, the working background vacuum is ≤ 4 × 10-4Pa, and the overall leakage rate of the equipment is ≤ 10Pa after the pump is stopped for 12 hours. 4
Air intake and heating Spray air intake mode, the use of armored heating wire and closed stainless steel stove to heat the substrate, can be heated RT ~ 450 ℃, controllable and adjustable. 5
Process Overview The capacitive coupling dual-frequency plasma activates the gas, the high-frequency part of the dual-frequency power supply controls the plasma flux, and the low-frequency part controls the plasma energy. Sample size ≤ 8 inches, substrate and electrode spacing 5~50mm online adjustable, working control pressure 10Pa ~ 1000Pa, gas control loop 6, dual-frequency power supply frequency 13.56MHz/400KHz. 6
Security System When the vacuum chamber door is opened and the vacuum chamber is in the open state, the system automatically turns off the power supply in the vacuum chamber, and the whole set of equipment is equipped with strong electric leakage protection device and AC power supply system detection and alarm device.
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Contact: Miss Dai
Address: 1704, Building 1, Chongwen Park, Nanshan Zhiyuan, 3370 Liuxian Avenue, Nanshan District, Shenzhen City, Guangdong Province
Shenyang Office Address: Shenyang University Science Park, No.15 Wanghua South Street, Dadong District, Shenyang City, Liaoning Province
Telephone:13632750017
E-mail:sales@hitsemi.com
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