High vacuum ultra clean atmosphere furnace
- Product Description
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Configuration and Metrics 1
Equipment structure The overall horizontal front and rear door opening structure of the equipment, mirror polishing of the 304 material, double-layer water cooling of the furnace body, and water cooling in the middle of the furnace shell. The side of the furnace body is provided with a water-cooled electrode, and the furnace body is provided with a vacuum pumping interface, an electrode interface, a charging interface, etc. The insulation screen is fixed on the stainless steel frame and arranged around the outside of the heating chamber. The vacuum coating chamber is φ1200 × 1000mm. 2
electronic control system It is composed of touch screen, programmable controller, voltage regulator, vacuum gauge and recorder to realize power supply, control, recording, monitoring, alarm and protection functions. 3
Heating and working system High purity tungsten/molybdenum heater, heating area 300 (deep) * 200 (wide) * 200 (high) mm, maximum heating power 60KW, maximum temperature 1800 ℃, working temperature ≤ 1600 ℃, temperature control accuracy 1 ℃, temperature measurement accuracy 1% FS, temperature uniformity 6 ℃. Multi-layer tungsten, molybdenum reflection screen and high temperature stainless steel screen are combined into closed space insulation. Tungsten rhenium thermocouple, monitoring thermocouple combination temperature control. 4
Vacuum system The vacuum system consists of a molecular pump, a mechanical pump, a vacuum gauge, a high vacuum flapper valve, a vacuum vent valve, a vacuum bellows, etc. The pumping speed of the dry pump is 160 m3/h, the pumping speed of the molecular pump is 18000 m3/h, the limit vacuum degree is 6.67 × 10-4Pa, and the working vacuum degree is 6.67 × 10-3Pa. 5
water cooling system It is composed of various valves, temperature measuring devices, water flow meters and pipeline related devices, with over-temperature of cooling water at key positions, water cut-off alarm and corresponding protection actions.
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Contact: Miss Dai
Address: 1704, Building 1, Chongwen Park, Nanshan Zhiyuan, 3370 Liuxian Avenue, Nanshan District, Shenzhen City, Guangdong Province
Shenyang Office Address: Shenyang University Science Park, No.15 Wanghua South Street, Dadong District, Shenyang City, Liaoning Province
Telephone:13632750017
E-mail:sales@hitsemi.com
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