Vacuum device leak detection table
- Product Description
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Project
Configuration and Metrics
1
Overall configuration
The whole equipment consists of vacuum system, leak detection chamber, transition chamber, mass spectrometer and control system. The vacuum storage chamber is made of 304 stainless steel, with internal and external electrolytic polishing, a number of reserved flanges and 7 sets of leak detection workpiece installation platforms. Quadrupole mass spectrometer 1 set.
2
Vacuum system
Equipped with 24m 3/h pumping speed scroll dry pump, pumping speed 2232 m3/h magnetic levitation molecular pump, cavity limit vacuum ≤ 2X10-5Pa, equipped with a range of 105Pa ~ 10-6Pa composite vacuum gauge, 2 sets of high and low vacuum gauges.
3
Leak detection index
In the measurement mode, the pumping speed is 2.5 l/s, the number of molecules is 1~100, the minimum leakage rate can be detected to 1 · 10E-13 Pa · m3/s, the running preparation time is 3min, the response time is 5S min, and the leakage rate is linear logarithmic output.
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Contact: Miss Dai
Address: 1704, Building 1, Chongwen Park, Nanshan Zhiyuan, 3370 Liuxian Avenue, Nanshan District, Shenzhen City, Guangdong Province
Shenyang Office Address: Shenyang University Science Park, No.15 Wanghua South Street, Dadong District, Shenyang City, Liaoning Province
Telephone:13632750017
E-mail:sales@hitsemi.com
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